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Innotec DS-28C High Vacuum Batch Sputtering System Chamber

This Innotec DS-28C High Vacuum Batch Sputtering System Chamber
SKU: 40888
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This Innotec DS-28C High Vacuum Batch Sputtering System Chamber is not complete and being sold for refurbishment or as a spare parts machine. It came from an R&D fab who no longer needed it.
  • Power rating: 208 VAC, Phase-3, 60 Amps, 60 Hz
  • Burton Transformer, SPEC # 16845. PRI: 208 / 240 VAC, SEC: 117 VAC, 1.5 kVA

  • Components inside/attached to chamber:
  • QTY = 1: ITT Jennings CVCJ-1000-3S, 7-1000PF, 3000Volts
  • QTY = 1: ITT Jennings CSVF-500-000, 12-500PF-10KV
  • QTY = 1: ITT Jennings CVDD-1000-15S, 25-1000PF-15KV
  • QTY = 1: ITT Jennings CVDD-500-15S, 20-500PF-15KV
  • QTY = 1: MKS Mass Flow Meter 1279A22CR1BV

  • Upper chamber dimension: appx 27" Diameter x 17" Tall
  • Lower chamber dimension: appx 21" Diameter x 20" Tall
  • Electrical Components:
  • QTY = 1: DISON Technologies PWP AMC068 / CCA AMC069 Controller Card/Board
  • QTY = 1: Innotec Voltage Panel Meter
  • QTY = 2: Innotec AMT Panel Controller
  • QTY = 1: Innotec Hoist Control Panel
  • QTY = 2: RF Blower Incident & Reflected Power Meters, model # 7900006010
  • MEIVAC Vari-Q Throttle Valve VQ-6-ASA-T-PA
  • Superior Electric Stepping Motor, Type: SS50G20

  • Overall Dimensions: 80" x 47" x 77" -- 1800 LBS
  • This item will require freight shipping. Please contact us for a freight shipping quote, to arrange local pickup, or to schedule a viewing at our facility.
  • Additional Info
    Brand Innotec
    MPN DS-28C
    Model No
    Product Name High Vacuum Batch Sputtering System Chamber
    Condition AS-IS
    Condition Description This item is being sold in As-Is condition and includes many useful parts. Please review description and photos and contact us with any questions.
    Weight 1800.0000
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