Innotec

Innotec DS-28C High Vacuum Batch Sputtering System 208V 3Ph 60A For Parts

Innotec

SKU:

40888

Availability:

This item requires freight shipping. Please contact us for a freight quote or to arrange local pickup or a facility viewing.

Weight:

1,800.00 LBS

Brand:

Innotec Group Inc.

Model:

DS-28C

MPN:

260730

Type:

High Vacuum Batch Sputtering System

SKU:

40888

Condition:

As-Is / For Parts or Not Working

Seller Notes:

Sold for parts/refurbishment. Not complete. Includes listed sub-components.

Country/Region of Manufacture:

United States

Power Requirements:

208 VAC, 3-Phase, 60 Amps, 60 Hz

Voltage:

208 VAC

Phase:

3-Phase, 5-Wire

Current Rating:

60 Amps

Frequency:

60 Hz

Application / Use Case:

Thin Film PVD Sputtering, Semiconductor, R&D Fabrication

Upper Chamber Dimensions:

Approx. 27" Diameter x 17" Tall

Lower Chamber Dimensions:

Approx. 21" Diameter x 20" Tall

Overall Dimensions:

80" x 47" x 77"

Transformer:

Burton SPEC #16845, 208/240V PRI, 117V SEC, 1.5 kVA

Throttle Valve:

MEVAC Vari-Q VQ-6-ASA-T-PA

Vacuum Capacitor 1:

ITT Jennings CVCJ-1000-3S, 7-1000PF, 3000V

Vacuum Capacitor 2:

ITT Jennings CSVF-500-0010, 12-500PF, 10KV

Vacuum Capacitor 3:

ITT Jennings CVDD-1000-15S, 25-1000PF, 15KV

Vacuum Capacitor 4:

ITT Jennings CVDD-500-15S, 20-500PF, 15KV

Mass Flow Meter:

MKS 1279A22CR1BV

Controller Card:

DISON Technologies PWP AMC068 / CCA AMC069

RF Power Meters:

Incident & Reflected RF Power Meters, Model 7900006010

Stepping Motor:

Superior Electric SS50G20

Form Factor:

Freestanding Cabinet System on Casters

Condition Notes:

Innotec DS-28C High Vacuum Batch Sputtering System sold as-is for parts or refurbishment. Not complete, not tested, not guaranteed functional. Came from an R&D fab. Sub-components remain installed. Freight shipping required — contact us for a quote.

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov