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Technics PE II Planar Etch II Plasma Etcher Asher with 13.56 MHz RF Generator

$4,077.00
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SKU:
44235
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Used
Technics PE II  Planar Etch II Plasma Etcher Asher with 13.56 MHz RF Generator

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Technics PE II Planar Etch II Plasma Etcher Asher with 13.56 MHz Model 750 RF Plasma Generator.
  • The Technics PE-II is a plasma-induced etcher that can be used for photoresist ashing, surface cleaning, and surface treatment and/or etching of various materials.
  • This is equipped with a RF energy power supply (13.56 MHz) and is used with process gas.
  • The RF power is variable allowing the operator to tailor the plasma density to suit the etching requirements.
  • The system is equipped with a heater and thermocouple to monitor the temperature.
  • Power rating: 110 VAC, 20 Amps, 60 Hz