Description
Semicore SC1500 Series Horizontal Inline DC RF Sputtering Chamber SC1526
- Power Rating: 208 Volt AC, 150 Amp, 3-Phase, 30 Hz
- Air: 100 PSI
- Water: 60 PSI, 18 GPM
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- Targets measure 14.875" x 4.75"
- Silver coated, copper body target
- Some of the targets have movable magnets
- Overall unit dimensions: 136" Long x 52" Wide x 87" Tall -- 3500 LBS
- Vacuum chamber measures 133" long