Clicky

Edwards QDP40 Dry Semiconductor DryStar Vacuum Pump 208/480 V 3-Phase 0.03 mbar

$2,800.00
(No reviews yet) Write a Review
SKU:
46857
Condition:
Used
Shipping:
Calculated at Checkout
Edwards QDP40 Dry Semiconductor DryStar Vacuum Pump 208/480 V 3-Phase 0.03 mbar

Out of stock

Request Quote
Edwards QDP-40 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These Dry Pumps are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.

General Specifications:
  • Power rating: 208 / 480 VAC, 3-Phase, 60 Hz
  • Warm-Up Time: 15 min
  • Motor Rating: 2.2 kW
  • Inlet Connection: ISO40
  • Outlet Connection: NW40
  • Water Cooled
  • Vacuum System Maximum Leak-Rate: 1 x 10-
  • 5 mbar ls-1 (1 x 10-3 Pa ls-1)
  • Exhaust System Maximum Leak-Rate: 1 x 10-
  • 5 mbar ls-1 (1 x 10-3 Pa ls-1)
  • Ambient Operating Temperature Range: 5
  •