Description
Edwards-Logitech Auto 306-WCS Wax Coating System
The Logitech Wax Coating System is based on the Edwards Auto-306 Coating System with diffusion pump and resistive heat source - includes trays for four each four inch wafers & six each three inch wafers.
Installed Components:
Edwards FTM5 Thickness Monitor
Edwards E2M8 Vacuum Pump
Edwards EMF10 Oil Mist Filter
Edwards PV25EKA Solenoid Isolation Valve Edwards E04 Diffusion Pump
Edwards E21911608 Vacuum Interlock Switch
Power Requirements:
220 VAC / 1 PH / 60 Hz / 3 KVA
Chamber Dimensions:
9.75D x 11.5H
View AllClose
The Logitech Wax Coating System is based on the Edwards Auto-306 Coating System with diffusion pump and resistive heat source - includes trays for four each four inch wafers & six each three inch wafers.
Installed Components:
Power Requirements:
Chamber Dimensions: