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Edwards-Logitech Auto 306 Thermal Evaporator Coating System

$20,000.00
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SKU:
19047
Condition:
Used
Shipping:
Calculated at Checkout
Edwards-Logitech Auto 306  Thermal Evaporator Coating System

Out of stock

Edwards-Logitech Auto 306-WCS Wax Coating System
The Logitech Wax Coating System is based on the Edwards Auto-306 Coating System with diffusion pump and resistive heat source - includes trays for four each four inch wafers & six each three inch wafers.
Installed Components:
  • Edwards FTM5 Thickness Monitor
  • Edwards E2M8 Vacuum Pump
  • Edwards EMF10 Oil Mist Filter
  • Edwards PV25EKA Solenoid Isolation Valve
  • Edwards E04 Diffusion Pump
  • Edwards E21911608 Vacuum Interlock Switch
    Power Requirements:
  • 220 VAC / 1 PH / 60 Hz / 3 KVA
    Chamber Dimensions:
  • 9.75D x 11.5H