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ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform

$30,000.00
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SKU:
16179
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Used
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ASTeX AX3060 ECR Plasma Source  PECVD Diamond Reactor - Large Platform

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ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform
MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility.
Includes:
  • ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit
  • Astex SXRH Magnetron Head
  • CS & LS Isolator/Tuner
  • SmartMatch Detector Module
  • Astex AX3060-4 Local Interface
  • Astex ECR 3 uW
  • Astex DSM 2.5-10.5 Exit Magnet
  • MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output
  • MSP Mills TS200-1.0
  • Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves
  • Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly
  • Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment
  • Manufacturer's Website
  • Large Frame/Platform & Misc Plasma Therm SLR 770 Components
  • Microwave & ECR Power Supply, Vacuum Pump & Computer not included.
    Applications:
  • Base Unit for Constructing Customized Diamond CVD System
  • Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System
  • Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
  • Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
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