Description
Allied Signal 30X-150-A-II ElectronCure 30 E-Beam Photoresist Curing Tool - As Is
Unit is missing Head Electron beam exposure system capable of exposing large area substrates uniformly at precision dose for curing coatings and hardening photoresist. Variable Beam Voltage 0-30 KV in 100V Steps Computer Controlled - Fully Automatic 75mm (3 Inch) to 150mm (6 Inch) Round Wafers 4 Inch x 4 Inch Square Plates Operates at 55 millitorr Vacuum
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