Description Description DRIE-100 Vol 1 & 2; DRIE-100/102 Vol 1 & 2 DRIE-100/102 PM Troubleshoot and Service Manual Handbook of Plasma Processes View AllClose
Add to Cart Quick view Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals Drytek Was: $6,750.00 Was: $20,000.00 Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+... 19334 SKU: 19334 Weight: 1,370.00 LBS
