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Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System

$2,500.00
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SKU:
19334
Condition:
Used
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Drytek DRIE-100  Cassette Planar Plasma Wafer Etcher System
Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System
  • Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+
  • Low energy etching for minimal substrate damage.
  • Excellent selectivity, e.g., 20:1 poly Si:SiO2
  • Laser interferometer for etch rate determination and end-point detection.
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit
  • Various Accessories & Wafer Holders Included
  • Complete Manuals Included
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump Available $1995
  • This item was pulled from a high end cellular equipment manufacturer and appears to be in good condition. It is sold as is for parts or repair value.