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Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals

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SKU:
19334
MPN:
DRIE-100
Condition:
Used
Shipping:
Calculated at Checkout
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
$7,500.00
Was: $20,000.00

Description

Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals


  • Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+
  • Low energy etching for minimal substrate damage.
  • Excellent selectivity, e.g., 20:1 poly Si:SiO2
  • Laser interferometer for etch rate determination and end-point detection.
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit
  • Various Accessories & Wafer Holders Included
  • Complete Manuals Included

     

    Condition: For Parts or Not Working

    This Drytek plasma wafer etching system came from a R&D application for superconductor cellular tower switching manufacturer. Because of its age and lack of recent use we are selling it in AS-IS condition. Please view our photo set and contact us if you have any questions.

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