Semi-automated Computer Controlled Wafer and Chip Inspection Station with 10 Axis motion control utilizing Rotary and Linear Slide Stages, CCD Inspection Camera, fitted on a Newport Optical Vibration Isolation Table.
9 Qty PPL (Pacific Precision Labs) ST-SLO4-V-P025 Fine .25 scale, 4 travel stages configured as 3 Qty 3-axis stages. Six stages are fitted with Heidenhien glass scales Model: MSA 6706, ML 170MM, Interval 200M, with external filters. Three stages are fitted with RSK Electronics Aluminum scales, MSA 6706, ML 120 and 170, pitch 0.02 mm . All stages are fitted with Distributed Motion Inc. Servo Motor Drives, pn: R0062. BEI MX213-25-1000 Rotary Stage. Compumotor Motion Controllers Qty 9 model: DB-Drive housed in 3-Axis PPL X-Y-Z motion rackmount controller housing. Compumotor S6-drive. Compumotor Microstep Drive S Series Power supply. Sony XC-77 CCD Video Camera with DC-77RR power supply, Sony SSM-121 Black & White Monitor. Techniquip T-Q/FOI-1 150 W Fiber Optic Illuminator with light guide and Ring Illuminator. Dual Bay 19 Inch Industrial Rack Cabinet. Manufactured by Wyle Electronic Enclosures. 78H x 30D x 46W with 17 Monitor Enclosure, Work Surface, External Monitor Arm, and Various Accessories. ICS Advent Industrial Rack Mount Chasis with Single Board Pentium Computer Delta Tau PMAC-PC ISA Motion Control Boards (2 Qty) $2,899 ea List, with PMAC-CPU Board (Gull). Power Modual: Input 3Ph, 60hz, 20 amp, Output 110v, 2 front, 3 rear. NRC Newport Optical Breadboard and Table Assembly, 48 x 36 x 2 w/ 1 hole spacing. Table set on Mohave Stand. Stepper Servo Assembly: Data Tau (3 qty) PMAC ACC8- D, (3 qty) PMAC ACC8-D w/Opt 2a, 300 khz. With separate Rack with (4 qty) DC Power Supplies. This is a custom built inspection station which has an estimated replacement cost of approximately $65,000.