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Varian RF Plasma Power HFS-1000D 13.56MHz Supply (684328)

$1,200.00
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SKU:
42472
Condition:
New
Varian RF Plasma Power HFS-1000D 13.56MHz Supply (684328)
/ Controller Cabinet
  • Unit is AS-IS for parts or repair.
  • Assembly No. 684328 Rev. H
  • Schematic 684326 Rev. B
  • 208 Volt, 14 Amp, 50/60 Hz, Phase 1
  • Software Version No. 3180 Version 15B, 021784-1
  • RF Plasma Controller APCS-3
  • HFS-1000D 13.56MHz
  • 208 / 240 VAC