Description
Varian RF Plasma Power HFS-1000D 13.56MHz Supply 684328 / Controller Cabinet AS IS
- Unit is AS-IS for parts or repair.
- Includes two Eimac 8438/4-400A tubes
- Assembly No. 684328 Rev. H
- Schematic 684326 Rev. B
- 208 Volt, 14 Amp, 50/60 Hz, Phase 1
- Software Version No. 3180 Version 15B, 021784-1
- RF Plasma Controller APCS-3
- HFS-1000D 13.56MHz
- 208 / 240 VAC
