Description
Varian HFS-1000D 13.56MHz RF Plasma Power Supply APCS-3 684328 Eimac 8438
The Varian HFS-1000D is a 13.56 MHz RF plasma power supply built by Varian Associates' Thin Film Technology Division for use in plasma-assisted thin-film deposition and etch systems. It is housed in a self-contained floor-standing cabinet and incorporates the APCS-3 (Automatic Power Control System) RF plasma controller, which provides both manual and automatic power control modes along with VSWR protection and alarm functions. The amplifier section uses Eimac 8438/4-400A external-anode tetrode power tubes as the final RF amplification stage.
Specifications & What's Included
- Manufacturer: Varian Associates, Thin Film Technology Division — Palo Alto, California
- Model: HFS-1000D
- RF Frequency: 13.56 MHz
- Input Voltage: 208 / 240 VAC
- Input Current: 14 Amps
- Input Frequency: 50/60 Hz
- Phase: Single Phase
- Assembly No.: 684328, Rev. H
- Schematic No.: 684326, Rev. B
- Software Version: 3180 Version L5B
- Software Version No.: 021784-1
- Controller: APCS-3 RF Plasma Controller (integrated in cabinet)
- Power Tubes: 2x Eimac 8438 / 4-400A external-anode tetrode (included)
- Form Factor: Floor-standing cabinet on casters
- Front Panel Controls: Auto/Manual Power Control, Local/Remote Control, Incident/Reflected Control, RF On/Off, Power level (Min–Max), PA Input Tuning, Oscillator Tuning
- APCS-3 Panel: VSWR Trip dial, VSWR Alarm indicator, Preamp switch, Reflected indicator, Reset pushbutton
- Metering: Percent Multimeter with rotary selector (V3 Ec 500V, V2 Ic 250mA, V2 Ig 2.5mA, V1 Ik 25mA, V3 Ia 50mA, V3 Iao 250mA, LV 1000V, HV 5kV, PA Plate Current 1A)
- Fusing: Five fuse holders (F1–F5) on lower front panel
- Circuit Breakers: Control and Line breakers on lower front panel
- Country of Manufacture: USA
Applications
The HFS-1000D was designed for semiconductor and thin-film manufacturing processes that require a stable 13.56 MHz RF source — the industry-standard ISM frequency used in plasma-assisted physical vapor deposition (PVD), RF sputtering, and plasma etch systems. Varian's Thin Film Technology Division produced this equipment for integration into their sputtering and deposition platforms during the 1970s and 1980s, a period when vacuum thin-film processes were becoming central to semiconductor device fabrication. The APCS-3 automatic power control system allows the RF power delivered to the plasma load to be regulated automatically despite changes in plasma impedance, while the VSWR protection circuit prevents reflected power from damaging the final amplifier tubes. Equipment of this type is still sought by operators maintaining legacy Varian deposition systems, by research labs running plasma processes, and by parts buyers needing the Eimac 8438/4-400A tubes or APCS-3 controller components.
This Varian HFS-1000D 13.56MHz RF Plasma Power Supply is being sold AS-IS for parts or repair. It is not guaranteed functional and has not been tested at our facility. The unit includes two Eimac 8438/4-400A power tubes and the APCS-3 RF plasma controller cabinet. The cabinet exterior shows general wear consistent with laboratory use; the front panels, control knobs, switches, and meter appear intact and complete as shown. The line circuit breaker is in the OFF position in the photos. All photos show the unit as-found — buyers are strongly encouraged to review the full photo set carefully. Please contact us with any questions before purchasing.
Warranty Information
Additional Information
Brand: |
Varian |
Model: |
HFS-1000D |
MPN: |
684328 |
Secondary Model: |
APCS-3 |
SKU: |
42472 |
Type: |
RF Plasma Power Supply |
Frequency: |
13.56 MHz |
Voltage: |
208 / 240 VAC |
Current Rating: |
14 Amp |
Phase: |
Single Phase |
Input Frequency: |
50/60 Hz |
Assembly Number: |
684328 Rev. H |
Schematic Number: |
684326 Rev. B |
Software Version: |
3180 Version L5B |
Software Version Number: |
021784-1 |
Controller: |
Varian APCS-3 RF Plasma Controller |
Tubes Included: |
2x Eimac 8438 / 4-400A |
Form Factor: |
Floor-Standing Cabinet |
Country/Region of Manufacture: |
United States |
Division: |
Varian Thin Film Technology Division |
Application: |
RF Plasma / PVD Sputtering / Semiconductor |
Seller Notes: |
Includes two Eimac 8438/4-400A tubes and APCS-3 controller cabinet. Sold AS-IS, no warranty. |
Condition Notes: |
This Varian HFS-1000D 13.56MHz RF Plasma Power Supply is sold AS-IS for parts or repair. Not tested or guaranteed functional. Includes two Eimac 8438/4-400A tubes and APCS-3 controller. Please view photos and contact us with questions. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |
