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Thermco Three Tube Furnace 3 Stack Tube Furnace - Setup for 4 inch Wafers

$9,000.00
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SKU:
34920
Condition:
Used
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Thermco Three Tube Furnace   3 Stack Tube Furnace - Setup for 4 inch Wafers

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Thermco Three Tube Furnace 3 Stack Tube Furnace - Setup for 4 inch Wafers but may be able to support up to 5 inch wafers with larger quartzware.
  • Type B/A 371 B-1
  • 48KW 58A
  • Temperature: 1300C
  • Power: 480 Volt, Three Phase.
  • Gas Application: Oxygen, Hydrogen, and Forming Gas (95% H2 / 5% N2).
  • Gas Jungles and Mass Flow Controllers Included.
  • Other Utilities: Exhaust and (Optional but Recommended) Cooling Water for the Vestibules.
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