Thermco Three Tube Furnace 3 Stack Tube Furnace - Setup for 4 inch Wafers but may be able to support up to 5 inch wafers with larger quartzware.
Type B/A 371 B-1 48KW 58A Temperature: 1300C Power: 480 Volt, Three Phase. Gas Application: Oxygen, Hydrogen, and Forming Gas (95% H2 / 5% N2). Gas Jungles and Mass Flow Controllers Included. Other Utilities: Exhaust and (Optional but Recommended) Cooling Water for the Vestibules.