Technics

Technics West PE-II PlanarEtch II Plasma Etch Cabinet Chassis 8" Chuck AS-IS

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SKU:
47337
MPN:
PE-II
Condition:
Used
Availability:
Currently out of stock — contact us for availability.
Weight:
155.00 LBS
Shipping:
Calculated at Checkout
  • Technics West PlanarEtch II PE-II plasma etch chassis — 3/4 front-right view showing aluminum chamber assembly on top, partial front panel with controls, and open red-painted interior bay with loose wiring bundle
  • Technics West Inc. rating plate — Model PE-II, Serial No. 30617, 115V, 20A, 60Hz, 20 PSI Water, manufactured 3-29-82, San Jose CA, Made in U.S.A.
  • Technics PlanarEtch II front panel — full view showing ATC timer module, viewport window, two vertical flowmeters, TORR vacuum display, and rotary controls on white panel with red cabinet
  • Technics PlanarEtch II front panel close-up — straight-on view with branding label, ATC timer lower-left, rotary switch set to OFF, dual flowmeters right side, and TORR vacuum gauge area
  • ATC Automatic Timing Controls timer module close-up — digital readout showing 0151 min with four pushbutton preset keys
  • Dual vertical tube flowmeters with rotary needle valve controls on PlanarEtch II front panel, with TORR vacuum gauge area and process gas controls visible
  • Aluminum chamber lid assembly viewed from above — label reads EQ #152 PEVCD Si3N4 #1, with red and other wiring leads on top and side port fitting
  • PlanarEtch II chamber open — hinged aluminum lid raised showing black O-ring seal on underside; 8-inch circular chuck/platen below with iridescent surface discoloration and center hole
  • Rear/side plumbing panel — Gas 1 Supply/Vent and Chamber Gas fittings on left, Water Chamber/Return/Supply fittings on right, blue solenoid valve (Swagelok-style) and Technics West rating plate visible
  • Interior of PE-II cabinet with lower front panel removed — sparse red-painted interior showing loose wiring harness bundle and gas/water manifold panel at top; chassis is largely gutted
  • Interior close-up — ATC Automatic Timing Controls motor/timer unit with blue label (King of Prussia, PA) surrounded by multi-color wiring bundle
  • Close-up of vacuum manifold/port area — stainless tube with small viewport or gauge port, brass compression fittings, and signal wiring
  • Technics PlanarEtch II PE-II front 3/4 view — full system showing aluminum chamber on top, complete front panel with flowmeters, timer, and controls, red and black cabinet
  • Technics West PlanarEtch II PE-II — front-right 3/4 view showing chamber assembly on top, partially exposed interior bay, side panel, and rear wiring/control panel
$931.00
Was: $2,000.00

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Description

Technics West PE-II PlanarEtch II Plasma Etch Cabinet Chassis 8" Chuck AS-IS

The Technics West PE-II, marketed as the PlanarEtch II, is a benchtop plasma etching system designed for semiconductor wafer processing. This listing is for the cabinet chassis assembly only — an incomplete unit being sold as-is for parts or repair. The lower interior bay has been largely stripped of its main functional components; what remains is the structural chassis, the chamber/chuck assembly on top, the front panel controls, and the rear gas and water plumbing panel.

Specifications & What's Included

  • Make: Technics West Inc. (San Jose, CA)
  • Model: PE-II / PlanarEtch II
  • Serial Number: 30617 (internal reference)
  • Date of Manufacture: March 29, 1982
  • Input Power: 115V AC, 20A, 60 Hz
  • Water Cooling: 20 PSI
  • Chuck Diameter: 8" (203 mm)
  • Chamber Height: approximately 4" from chuck top to lid underside
  • Overall Dimensions: 26" W × 20" D × 24" H (approx. 110 lbs)
  • Cabinet: black and red steel frame with red-painted interior
  • Chamber lid: aluminum, hinged, with black O-ring seal — present and included
  • Chuck/platen: 8" circular water-cooled platen with center port — present; surface shows iridescent process discoloration
  • Front panel: white panel with "Technics PlanarEtch II" label, TORR vacuum display, process gas controls, and toggle/rotary switches
  • Flowmeters: two vertical tube flowmeters with rotary needle valves — present on front panel
  • Timer: ATC (Automatic Timing Controls, King of Prussia, PA) process timer module — present; reads 0151 min
  • Rear plumbing panel: Gas 1 (Supply, Vent), Chamber Gas, and Water (Chamber, Return, Supply) fittings with solenoid valve — present
  • Wiring harness: partial, present in interior bay
  • NOT present: RF generator, vacuum pump, main power supply, and other major operational subsystems

Applications

The Technics West PlanarEtch II belongs to a family of parallel-plate plasma etching systems widely used in semiconductor fabrication during the late 1970s and 1980s. These systems use RF-generated plasma to etch dielectric films, polysilicon, metals, and photoresist from wafer surfaces in processes such as oxide etch, nitride etch, and resist stripping. The 8" chuck configuration accommodates wafers up to 8" in diameter, or multiple smaller wafers. Technics West systems were common fixtures in university research labs, government facilities, and small-volume semiconductor production lines of their era. The PlanarEtch II was a step forward from earlier barrel-style etchers, offering the improved etch uniformity and directionality of a planar electrode configuration. Today these systems are most useful as a source of chamber components, plumbing hardware, chuck assemblies, and process tooling for repair or integration into other plasma process equipment.

Condition: For Parts or Not Working
This Technics West PE-II PlanarEtch II plasma etch chassis is sold AS-IS for parts or repair. The cabinet is an incomplete unit — the lower interior bay is largely gutted, retaining only a partial wiring harness, the gas and water plumbing rear panel, and the front panel controls. Major system components that would be needed for operation (RF generator, vacuum pump, power supply, etc.) are absent. What is present includes the cabinet frame, the aluminum chamber lid assembly with O-ring seal, the 8" water-cooled chuck/platen, two front-panel flowmeters, the ATC process timer, and the rear gas and water connection panel. The chamber lid and chuck show normal surface discoloration consistent with prior semiconductor processing use. The red-painted cabinet interior shows general wear and accumulation. This unit has not been tested and is not guaranteed functional in any way. Please review all photos carefully and contact us with any questions before purchasing.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Technics West
Model:
PE-II
MPN:
PE-II
Secondary Model:
PlanarEtch II
Type:
Plasma Etch System Chassis
SKU:
47337
Seller Notes:
Includes cabinet chassis, chamber assembly, 8" chuck, flowmeters, front panel, and partial wiring harness. Sold as-is — incomplete/missing components.
Country/Region of Manufacture:
United States
Voltage:
115V AC
Amperage:
20A
Frequency:
60 Hz
Water Pressure:
20 PSI
Chuck Size:
8" (203 mm) diameter
Chamber Height:
Approx. 4" (chuck top to lid bottom)
Overall Dimensions:
26" W x 20" D x 24" H
Application:
Plasma Etching / Semiconductor Wafer Processing
Form Factor:
Benchtop Cabinet
Date of Manufacture:
March 29, 1982
Included Components:
Cabinet chassis, chamber lid, 8" chuck/platen, two flowmeters, ATC timer, partial wiring
Gas Connections:
Gas 1 Supply, Vent, Chamber Gas — rear panel fittings
Water Connections:
Chamber, Return, Supply — rear panel fittings
Timer:
ATC Automatic Timing Controls (King of Prussia, PA)
Vacuum Readout:
TORR display on front panel
Compatible With:
Technics West PE-II / PlanarEtch II series components
Condition Notes:
Technics West PE-II PlanarEtch II plasma etch chassis sold AS-IS for parts or repair. Interior is largely gutted — RF generator, pump, and power supply absent. Includes cabinet, chamber lid, 8" chuck, flowmeters, ATC timer, and plumbing panel.
California Prop 65 Warning:
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
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Seller Notes:
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Country/Region of Manufacture:
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Frequency:
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Form Factor:
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Gas System:
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Mass Flow Controller:
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Cooling:
Liquid coolant in/out connections on rear
Vacuum Connection:
To Vacuum Pump port on rear
DC Bias:
DC Bias control and display (front panel)
Front Panel Controls:
Pressure, Flow, Temp displays; Chamber Pressure meter; RF On, Chan I/II selectors
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