Description
Solitec 5110 Photoresist Spinner Scrubber. The 5100 SJ provides spin processing of single wafers/substrates of up to 225mm diagonal. Semi-automatic (manual load/unload) operation. SJ Feature: Scrub/Jet High pressure Jet (3000psi max.) with rotational scrub brush. www.solitec-wp.com/researchsys.html
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