Description
Lambda Physik Novaline K2020B 80W 248nm Excimer Laser for Semiconductor / Wafer - NovaTube
From the Manufacturer NovaLine K2020 - High Power, Low Operating Cost.
The K2020 model has been designed for high throughput DUV scanner systems using a catadioptric imaging lens. This laser system, with a bandwidth of about 50 pm, provides high efficiency and significantly lower operating costs.
The resonator is optimized for the relaxed bandwidth requirement. As a result, the output power is increased to 30 W and the overall operating cost of this DUV laser is reduced. Optimization of the NovaTube and discharge circuitry provide highly stable output with a standard deviation of less than 1 percent at 2 kHz repetition rate. PowerLok, a Lambda Physik proprietary energy control system, stabilizes the exposure dose with an accuracy of typically ±0.25 percent.
Condition: Used
This used laser system has been inspected and appears to be in good condition. It was pulled from a working environment where it was in use and functional. Please view our photo set and contact us if you have any questions.
