Clicky

Lambda Physik LPX 305i Excimer Laser Deep UV DUV for Adv Lithography

$50,000.00
(No reviews yet) Write a Review
SKU:
16224
Condition:
Used
Shipping:
Calculated at Checkout
Lambda Physik LPX 305i  Excimer Laser Deep UV DUV for Adv Lithography

Out of stock

Request Quote
Lambda Physik LPX 305i Industrial Excimer Laser

Specifications:
  • Pulse Energy 193nm - 650 mJ, 248 nm 1200 mJ, 351 nm, 400 mJ
  • Max Rep. Rate 50 Hz
  • Average Power 248nm 50 Watt
    Features:
  • NovaTube technology for outstanding gas and tube lifetimes
  • Magnetic Switch Control (MSC) technology for extended thyratron lifetime
  • Electrostatic gas processor for extended gas lifetime and mirror cleaning intervals
  • Slide Valves with spare optics mounts
  • Easy access to optical components through the top panel of the laser

  • Power: 208 V, 50/60 Hz switchable, 3-phase
  • Cooling: 4 l/min (1.1 gal/mon), 15-20 deg C
  • Weight: Laser head: 661 lbs, Power supply 110 lbs, (Vacuum pump: 51 lbs not included)
  • Dimensions: Laser head: 77 L x 32 W x 19 H, Power supply: 18 x 7 x 30

    This item was pulled from a working environment and appears to be in good condition. It is sold as is with no warranty. No manual or peripherals are included. .
  •