This Innotec DS-28C High Vacuum Batch Sputtering System Chamber is not complete and being sold for refurbishment or as a spare parts machine. It came from an R&D fab who no longer needed it.
Power rating: 208 VAC, Phase-3, 60 Amps, 60 Hz Burton Transformer, SPEC # 16845. PRI: 208 / 240 VAC, SEC: 117 VAC, 1.5 kVA
Components inside/attached to chamber: QTY = 1: ITT Jennings CVCJ-1000-3S, 7-1000PF, 3000Volts QTY = 1: ITT Jennings CSVF-500-000, 12-500PF-10KV QTY = 1: ITT Jennings CVDD-1000-15S, 25-1000PF-15KV QTY = 1: ITT Jennings CVDD-500-15S, 20-500PF-15KV QTY = 1: MKS Mass Flow Meter 1279A22CR1BV
Upper chamber dimension: appx 27 Diameter x 17 Tall Lower chamber dimension: appx 21 Diameter x 20 Tall Electrical Components: QTY = 1: DISON Technologies PWP AMC068 / CCA AMC069 Controller Card/Board QTY = 1: Innotec Voltage Panel Meter QTY = 2: Innotec AMT Panel Controller QTY = 1: Innotec Hoist Control Panel QTY = 2: RF Blower Incident & Reflected Power Meters, model # 7900006010 MEIVAC Vari-Q Throttle Valve VQ-6-ASA-T-PA Superior Electric Stepping Motor, Type: SS50G20
Overall Dimensions: 80 x 47 x 77 -- 1800 LBS This item will require freight shipping. Please contact us for a freight shipping quote, to arrange local pickup, or to schedule a viewing at our facility.