Description
Imtec Accubath 5.7 Gal Heated Quartz Recirculating Wet Process Semiconductor
The Imtec Accubath is a heated, recirculating quartz wet process bath used in semiconductor wafer fabrication and microelectronics cleaning applications. It holds 5.7 gallons and uses an immersion heater controlled by an open-on-rise thermostat and a J-type thermocouple to maintain precise chemical bath temperatures. A built-in recirculation system circulates the process fluid through the quartz chamber to promote temperature uniformity and chemical consistency.
Specifications & What's Included
- Brand: Imtec — Model: Accubath
- Bath capacity: 5.7 gallons
- Outer dimensions: approximately 17" L x 17" W x 24" H
- Inner bath dimensions: approximately 11" L x 10" W x 12" D
- Bath construction: quartz
- Heating: immersion heater, 14 AWG stranded wiring
- Thermostat type: open-on-rise thermostat
- Thermocouple: J-type thermocouple (+/−)
- Plug configuration: 6-pin bath thermostat plug (as viewed from plug end)
- Compatible heater resistance models referenced on label: 104, 108, 110, 114A, 114E
- Recirculation system: built-in with standpipe tubes visible in bath interior
- Two stainless steel mesh heating elements flanking central baffle — visible in interior photos
- Hinged clear lid with open/close mechanism
- White polymer outer housing with gray drip-containment base tray
- Side-mounted overflow/drain assembly and fluid level/probe housing with multi-terminal connector block
Applications
Heated recirculating wet process baths like the Imtec Accubath are standard equipment in semiconductor wafer fabrication wet benches. They are used for chemical cleaning steps such as RCA clean, piranha etch (H₂SO₄/H₂O₂), buffered oxide etch (BOF/HF), DI water rinse, and solvent processes that require a controlled-temperature, circulated chemical bath. The quartz construction makes the bath chemically resistant to the harsh acids and solvents common in fab processes, and the precise thermostat/thermocouple control loop maintains the stable bath temperatures these processes require. These systems are used in wafer fab lines, university research cleanrooms, MEMS fabrication, and compound semiconductor processing facilities. The Imtec Accubath line was a widely used product in semiconductor process equipment setups from the 1980s through the 2000s and remains in service in legacy cleanroom environments and research labs today.
This Imtec Accubath 5.7 Gal Heated Quartz Recirculating Wet Process bath has been visually inspected and appears to be in good condition. It has not been powered up or tested at our facility, but came out of a working semiconductor processing environment where it was previously in use. The quartz bath basin and housing show chemical staining and discoloration on the sidewalls and interior — consistent with normal wet-process chemical exposure — and the heating elements, recirculation tubes, and thermocouple wiring appear intact. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Imtec |
Model: |
Accubath |
MPN: |
Accubath |
Type: |
Heated Quartz Recirculating Wet Process Bath |
SKU: |
48455 |
Capacity: |
5.7 Gallons |
Bath Construction: |
Quartz |
Outer Dimensions: |
17" L x 17" W x 24" H |
Inner Bath Dimensions: |
11" L x 10" W x 12" D |
Heating Element Type: |
Immersion heater, 14 AWG stranded |
Thermostat Type: |
Open-on-rise thermostat |
Thermocouple Type: |
J-Type thermocouple |
Plug Configuration: |
6-pin bath thermostat plug (open on rise) |
Application: |
Semiconductor wafer wet process cleaning |
Form Factor: |
Benchtop / Freestanding |
Seller Notes: |
System only — no additional accessories confirmed included |
Country/Region of Manufacture: |
United States |
Condition Notes: |
This Imtec Accubath 5.7 Gal Heated Quartz Recirculating Wet Process bath has been inspected and appears to be in good condition. Not tested at our facility; pulled from a working semiconductor processing environment. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |
