Hitachi PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series
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Hitachi Metals PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series
- PART: 0190-34212
- BIN: multi-04
- UFS: 100 SCCM
- GAS: N2
- SEMI GAS: 13
- CN: 1000
From the manufacturer:
With industry-leading flow control technology, Aera PI-980 Series pressure insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.
This innovative technology platform provides faster response, greater gas-flow stability, higher accuracy, and superior real-time process control when compared to previous technologies. High-flow stability delivers greater chamber-to-chamber process repeatability for improved production yields.
The PI-980 MFC's design integrates traditional thermal flow architecture with a pressure and temperature sensor, and NeuralStep control technology. This creates a single, compact delivery package, eliminating the need for a number of costly gas panel components traditionally utilized. Multi-gas, multi-range functionality dramatically reduces supporting inventory requirements, further enhancing cost efficiency. In addition to integrated diagnostics, this next-generation MFC technology has been combined with our field-proven D980 series product platform design to increase system uptime and make troubleshooting quick and easy.
This used item has been inspected and appears to be in good condition. It was pulled from a working environment where it was in use and functional. Please view our photo set and contact us if you have any questions.