Headway Research PWM32-PS-CB15 Spinner Pacific Scientific 3N63-030-6 Motor

Headway Research PWM32-PS-CB15 Spinner Pacific Scientific 3N63-030-6 Motor

The Headway Research PWM32-PS-CB15 is a precision photoresist spin coater designed for semiconductor wafer processing and photolithography applications. It pairs with a Pacific Scientific 3N63-030-6 brushed DC motor rated at 24 VDC / 6.2 A and is capable of speeds up to 10,000 RPM for coating relatively light substrates. This unit does not spin under DC power and is sold as-is for parts or repair only.

Specifications & What's Included

• Make: Headway Research, Inc.
• Model: PWM32-PS-CB15
• Type: Photoresist Spinner / Spin Coater
• Maximum Speed: Up to 10,000 RPM
• Substrate Capacity: Silicon wafers, small photomasks, and other light loads
• Motor Brand/Model: Pacific Scientific 3N63-030-6
• Motor Voltage: 24 VDC (Rated)
• Motor Current: 6.2 Amps (Rated)
• Motor Torque Constant: 5.80 oz-in/amp
• Motor Inertia: 0.00056 oz-in-sec²
• Motor Resistance: 1.00 Ohm
• Analog Tachometer Output: 2.5 Volts/KRPM
• Tachometer Resistance: 50 (avg) Ohms
• Tachometer Ripple: 1.5% peak-to-peak (max)
• Fluid Ports: Multiple labeled Drain ports, N2 Purge port, Vacuum to Motor port
• Motor Connector: Multi-pin circular connector P2 (rear end plate)
• Motor leads exit via 3-pin white connector (brush/tach leads)

Applications

The Headway Research PWM32 series spinners are used in semiconductor fabrication labs for spin-coating photoresist onto silicon wafers, photomasks, and similar thin, flat substrates. In photolithography, a substrate is held by vacuum on a spinning chuck and photoresist is dispensed at the center; the rotational speed controls the thickness and uniformity of the resist layer. The PWM32-PS-CB15 is a motor-only spinner sub-assembly — in full operation it would be mounted within a bowl assembly and driven by a dedicated Headway spin controller. The integrated Pacific Scientific brushed DC motor with analog tachometer feedback allowed closed-loop speed control typical of lab-grade spin coaters from the 1990s through 2000s, used in university cleanrooms, MEMS development labs, and small-volume IC prototyping environments. Buyers commonly acquire these for motor replacement, spare parts, or repair of existing Headway PWM32 systems.