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FSI Single Station Vapor Phase Wafer Etcher Cleaner Excalibur

$10,000.00 $8,000.00
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SKU:
42131
Condition:
Used
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FSI Single Station Vapor Phase Wafer Etcher Cleaner Excalibur
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This FSI Excalibur Single Station Vapor Phase Wafer Etcher Cleaner is an older model that came from and R&D facility in California. Spare parts for these FSI Excalibur Wafer etchers are hard to find and are many times dependent upon the year the tool was made. FSI did not always use the same components to build the same model tools from year to year. FSI is no longer supporting this tool so even though the tool is nearly complete its best use would be to provide spare parts for an existing tool. Product Details
  • Designed for 150mm Wafer
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  • Wafer washing station dimensions: inner platform diameter: 2.375
  • Wafer washing station dimensions: outer platform diameter: 6.0
  • Wafer washing station shield dimensions: inner diameter: 6.25
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