Entegris Ultrapak 100mm (4") Wafer Handling Wafer Shipping Boxes with Cassettes
Part #: Box H9100-0302, Cassette X9100-0405
From the manufacturer:
- Individual horizontal cantilever springs limit wafer rotation to reduce particle contamination and also secure the wafers in the cassette to safeguard against breakage.
- Ultrapure polypropylene materials provide a clean shipping environment and assure low levels of condensable inorganics.
- Horizontal and vertical robotic pickup flanges on the cassette allow convenient handling.
- Center notch track alignment and "H" bar ensure accurate equipment interoperability both vertically and horizontally.
- Assembly overall size: 163mm x 146mm x 120mm (6.4" x 5.8" x 4.7")
- D1: 14.53mm (0.57")
- Pitch: 4.76mm (0.19")
- Overall size: 143mm x 126mm x 108mm (5.6" x 5.0" x 4.3")