Custom Built X-Y-Z-T Stage High Precision Stage X-Y 0.5um Z 2.5um T 0.00004
This custom stage is noted for it's precise resolution of movement, zero backlash on all axis and no deflection at the outer 8 inch edge. Stage ? X-Y: Resolution X: 0.5 Microns Y: 0.5 Microns Max Speed X: 163 m/m Sec. Y: 163 m/m Sec Drive: Lead Screw Feed Back: Encoders Stroke X: 263 m/m Y: 417 m/m Dimensions: X Stage 18 Inch x 18 Inch Y Stage 14 Inch x 12 Inch Chuck ? Z ? T: Resolution Z: 2.5 Micron T Deg Step 0.00004 Max Speed Z: 31 m/m Sec. T: 10 m/m Sec. Drive Z: Lead Screw Drive T: Banana Belt Load Capacity: 18.114 Kg Chuck 8.25 Inch Diameter 11 Inch High 2 Each Compumotor Zeta4 Drives PN 87-014030-02A, & 87-014030-01A 2 Each Vexta Nano Step 5-Driver Model # DFR1507A. 2 Each Compumotor S83-62-MO Stepper Motors Drawings, Design Notes and Designer Available Original Cost of the X-Y Stage $17,000, Design Cost of Chuck (Z-T) $12,000, Construction Cost of Chuck $12,000, Plus Drives, Encoders, Steppers and Cabling. This item was removed from a custom, high-end prober. The original designer is available for questions and detailed specifications can be provided. This is a high precision X-Y-Z-T Stage. This product can be previewed at our facility in Ventura, CA during normal business hours 8am to 5pm M-F.