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Custom Built High Precision Stage X-Y 0.5um Z 2.5um T 0.00004 X-Y-Z-T Stage

$10,000.00 $8,000.00
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SKU:
35050
Condition:
Used
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Custom Built High Precision Stage X-Y 0.5um Z 2.5um T 0.00004  X-Y-Z-T Stage
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Custom Built X-Y-Z-T Stage High Precision Stage X-Y 0.5um Z 2.5um T 0.00004
  • This custom stage is noted for it's precise resolution of movement, zero backlash on all axis and no deflection at the outer 8 inch edge.
  • Stage ? X-Y:
  • Resolution X: 0.5 Microns Y: 0.5 Microns
  • Max Speed X: 163 m/m Sec. Y: 163 m/m Sec
  • Drive: Lead Screw
  • Feed Back: Encoders
  • Stroke X: 263 m/m Y: 417 m/m
  • Dimensions: X Stage 18 Inch x 18 Inch Y Stage 14 Inch x 12 Inch
  • Chuck ? Z ? T:
  • Resolution Z: 2.5 Micron T Deg Step 0.00004
  • Max Speed Z: 31 m/m Sec. T: 10 m/m Sec.
  • Drive Z: Lead Screw
  • Drive T: Banana Belt
  • Load Capacity: 18.114 Kg
  • Chuck 8.25 Inch Diameter 11 Inch High
  • 2 Each Compumotor Zeta4 Drives PN 87-014030-02A, & 87-014030-01A
  • 2 Each Vexta Nano Step 5-Driver Model # DFR1507A.
  • 2 Each Compumotor S83-62-MO Stepper Motors
  • Drawings, Design Notes and Designer Available
  • Original Cost of the X-Y Stage $17,000, Design Cost of Chuck (Z-T) $12,000, Construction Cost of Chuck $12,000, Plus Drives, Encoders, Steppers and Cabling.
  • This item was removed from a custom, high-end prober. The original designer is available for questions and detailed specifications can be provided. This is a high precision X-Y-Z-T Stage. This product can be previewed at our facility in Ventura, CA during normal business hours 8am to 5pm M-F.
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