Clicky

Allied Signal ElectronCure 30 E-Beam Photoresist Curing Tool -As Is 30X-150-A-II

$25,000.00
(No reviews yet) Write a Review
SKU:
22473
Condition:
Used
Shipping:
Calculated at Checkout
Allied Signal ElectronCure 30 E-Beam Photoresist Curing Tool -As Is 30X-150-A-II
Allied Signal 30X-150-A-II ElectronCure 30 E-Beam Photoresist Curing Tool - As Is
  • Unit is missing Head
  • Electron beam exposure system capable of exposing large area substrates uniformly at precision dose for curing coatings and hardening photoresist.
  • Variable Beam Voltage 0-30 KV in 100V Steps
  • Computer Controlled - Fully Automatic
  • 75mm (3 Inch) to 150mm (6 Inch) Round Wafers
  • 4 Inch x 4 Inch Square Plates
  • Operates at 55 millitorr Vacuum