Description
Advanced Energy PI-980 Aera Pressure Insensitive MFC
- CAL DATA
- AMAT
- FCPIDN980C-ABA
- BIN: MULTI-08
- RANGE: 10000 SCCM
- CAL GAS: N2
- DNET FW: 2.10
- N2 FLOWS:
- 100%: 10000.716 SCCM
- 50%: 499.351 SCCM
- 30%: 2999.593 SCCM
- 10%: 999.281 SCCM
- DIAPHRAGM: SPRON 510
- SEAT: PCTFE
- MAX OP PRES: 150 PSIG
- ACT PRES: 60-90 PSIG
Condition: Used
This used semiconductor tool has been inspected and appears to be in good condition. It was pulled from a working environment where it was in use and functional. Please view our photo set and contact us if you have any questions.
