Description
Advanced Energy PE-10/20K AC Plasma Power Source 3157515-000D For Parts
The Advanced Energy PE-10/20K is an AC plasma power source designed to drive plasma processes in semiconductor fabrication and thin-film deposition equipment. It operates at 40 kHz and is intended for use with plasma etch, reactive ion etch (RIE), and PVD sputtering systems where a stable AC plasma discharge is required. This unit powers on from a 208 VAC / 20A supply and the front-panel display is functional, but it is being sold AS-IS for parts or repair due to a burned-out RF output port and missing data cables that cause the safety interlock to flash. It is not guaranteed to be functional and should be purchased for parts, bench repair, or as a source of serviceable sub-assemblies.
Specifications & What's Included
- Manufacturer: Advanced Energy Industries, Inc.
- Model: PE-10/20K
- Part Number: 3157515-000D
- Hardware Revision: F/R D
- Type: AC Plasma Power Source
- Output Frequency: 40 kHz
- Input Power: 208 VAC, 20A
- Form Factor: Rackmount
- Front Panel Controls: POWER on/off, OUTPUT on/off (Local/Remote), DISPLAY (Voltage/Current), LEVEL knob (Local/Remote)
- Front Panel Indicators: STATUS LEDs — SETPOINT, PLASMA, OUTPUT, INTERLOCK, ARC, SLAVE, REMOTE, LOCAL; MONITOR display (kW, A, V)
- Rear Panel: Slave Interface with 6 multi-pin DB connectors, USER port, CEX OUT ports (A and B), BNC connectors, RF output coaxial ports, F1 and F2 fuse holders (2A/250V each), AC power inlet
- Rear cooling: large axial fan mounted on rear panel
- Known damage: RF output port is burned out (charred, destroyed center conductor — visible in photos)
- Missing: data cables (cause of interlock fault); several circuit boards removed from chassis
- Unit only — no cables, boards, or accessories included
Applications
Advanced Energy's PE series AC plasma power sources are used in semiconductor and flat-panel display manufacturing equipment, primarily to energize plasma chambers in processes such as plasma-enhanced chemical vapor deposition (PECVD), reactive ion etching (RIE), and physical vapor deposition (PVD) sputtering. The 40 kHz AC output is well suited for driving symmetric electrode plasma reactors where DC bias buildup on the electrodes must be avoided. These units were commonly integrated into OEM process tools from manufacturers such as Novellus, Trikon, and similar CVD/etch platform builders from the 1990s and 2000s. A working PE-10/20K is a core component of the plasma generation chain; sub-assemblies and boards from units like this are actively sought by engineers maintaining legacy process equipment.
This Advanced Energy PE-10/20K AC Plasma Power Source (P/N 3157515-000D) is being sold AS-IS for parts or repair. The unit does power on from a 208 VAC / 20A source and the front-panel display functions, but the safety interlock light flashes because the data cables are missing. The chassis has been opened and several circuit boards removed for inspection; the only damage found internally was a burned-out RF output port, which is clearly visible in our photos. This unit is not functional as-is and is not guaranteed to work. Please view our full photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Advanced Energy |
Model: |
PE-10/20K |
MPN: |
3157515-000D |
Secondary Model: |
3157515-000D |
Type: |
AC Plasma Power Source |
SKU: |
40613 |
Seller Notes: |
Unit only — data cables missing, no accessories included. |
Power Requirements: |
208 VAC, 20A |
Output Frequency: |
40 kHz |
Interface: |
Slave Interface (6 ports), CEX OUT, User port |
Connector Types: |
BNC, DB-type multi-pin, coaxial RF ports |
Form Factor: |
Rackmount |
Application: |
AC plasma etching, sputtering, PVD/CVD semiconductor processing |
Country/Region of Manufacture: |
United States |
Hardware Revision: |
F/R D |
Condition Notes: |
Advanced Energy PE-10/20K AC Plasma Power Source 3157515-000D sold AS-IS for parts/repair. Powers on at 208VAC/20A; display works. Interlock flashes — data cables missing. Burned RF port found on inspection. Not guaranteed functional. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |