Allied Signal ElectronCure 30X-150-A-II Electron Cure 30 E-Beam Photoresist Curing Tool

Electron beam exposure system capable of exposing large area substrates uniformly at precision dose for curing coatings and hardening photoresist.

Variable Beam Voltage 0-30 KV in 100V Steps

Computer Controlled - Fully Automatic

75mm (3 Inch) to 150mm (6 Inch) Round Wafers

4 Inch x 4 Inch Square Plates

Operates at 55 millitorr Vacuum