Description
Varian NRC 3117 Ebeam Deposition System Thermal Evaporator with Temescal E-Gun
18 Dia x 30 Tall Pyrex Bell Jar w/Implosion Cage 20 Dia Baseplate w/Hoist Leybold Heraeus Turbotronic NT 150/360 (P/N 85472-1) Controller Leybold Heraeus Turbovac 150 Vacuum Pump Temescal Multi-Pocket E-Beam Gun Varian Cryostack-8 Briscoe MFG Co. Brisk Heat Heater Model VRN211-001 Varian Ionization Gauge 0563-K2466-305 RD Mathis ATD GRS E/O Device K333 Tune/Couple Control Edwards E2 High Vacuum Two Stage Pump Model E2M8 Tested turbo pump and found it to be in good working condition
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