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Tylan-Tystar PVD-1000 Low Pressure CVD Reactor Photo-Enhanced

Tylan-Tystar PVD-1000 Low Pressure CVD Reactor Photo-Enhanced
SKU: 16186
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$10,000.00
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Details

Tylan PVD-1000 Low Pressure CVD Photo-Enhanced Reactor. (Currently supported by Tystar) The Photo-Enhanced CVD Reactor uses ultraviolet light as an energy source for activating process gases for the deposition of dielectric films at low temperatures (<150 c). films of silicon oxide (sio2), nitride(si3n4), oxy-nitride (sion) and others can be deposited. minimal stress is observed in these due to the low deposition temperature. since uv photon energy used does not ionize process gases, no radiation damage from charged particles has been observed.

The PVD 1000 deposited films offer an impressive step coverage. The PVD 1000 system is available with single-or dual-process chambers. The PVD 1000 reactor is used in a variety of applications for film deposition on "III/V" materials, such as gallium arsenide, indium antimonide and other materials that cannot tolerate higher deposition temperatures.

  • Two 316 Stainless Steel Reactor Chambers
  • Tymer 16 Programmable Timer/Sequencer
  • 3-Mode PID Temperature Controllers
  • MFS Electronic Gas Control System
  • High Intensity UV Lamp - Low Absorption UV Windows
  • VCR Gas Fittings
  • Details about System: www.tystar.com/additional_2.htm
  • Comparable New Cost $250,000
  • Original Photochemical Vapor Deposition Reactor Instruction Manual w/Schematics with Unit


  • This unit was received from a high end R&D facility and appears to be in good condition. Note that the Rotary Vane Pump and Mercury Pot (both available on the market) are missing and need replcing to operate the system. Please note that although removed from an active, working environment, we are selling this unit on and As is basis. This product can be previewed at our facility in Ventura, CA during normal business hours 8am to 5pm M-F.
    Additional Info
    Brand Tylan-Tystar
    MPN PVD-1000
    Model N/A
    Product Name Low Pressure CVD Reactor Photo-Enhanced
    Condition Used
    Condition Description This item has been inspected and it is in good condition.
    Weight 1110.0000
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