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Tegal Plasmaline 421 Resist Stripper w/Chamber, RF Generator, Power Source

Tegal Plasmaline 421 Resist Stripper w/Chamber, RF Generator, Power Sou
SKU: 19499
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$5,500.00
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Details

Tegal Plasmaline 421 Resist Stripper w/Chamber, RF Generator, Power Source
  • Model 421 RFG Main System
  • 300W Variable
  • 13.56 MHz RF Generator
  • Chamber size: 12" dia. x 11" Deep
  • Power: 120 V, 60 Hz
  • We have powered up this unit and tested both channels 1 & 2 are working
  • The RF Generator works, all controls ~ indicators function
  • The Tegal 421 is an oxygen barrel asher used to remove organic films (particularly photoresist). Heat and an oxygen plasma are used to burn or "ash" the organics from the substrate. These organics can be difficult to remove after excessive heat or plasma bombardment. Pieces up to 4 inch may be accommodated and silicon, III-V and glass substrates may be used either individually or in batch mode.
  • Manufacturer's Website
  • Additional Info
    Brand Tegal
    MPN Plasmaline 421
    Model N/A
    Product Name Resist Stripper w/Chamber, RF Generator, Power Sou
    Condition Used
    Condition Description This item has been inspected and it is in good condition.
    Weight 270.0000
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