Description
Tegal Plasmaline 421 Resist Stripper w/Chamber, RF Generator, Power Source Model 421 RFG Main System 300W Variable 13.56 MHz RF Generator Chamber size: 12 dia. x 11 Deep Power: 120 V, 60 Hz We have powered up this unit and tested both channels 1 & 2 are working The RF Generator works, all controls ~ indicators function The Tegal 421 is an oxygen barrel asher used to remove organic films (particularly photoresist). Heat and an oxygen plasma are used to burn or ash the organics from the substrate. These organics can be difficult to remove after excessive heat or plasma bombardment. Pieces up to 4 inch may be accommodated and silicon, III-V and glass substrates may be used either individually or in batch mode. Manufacturer's Website
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