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Drytek DRIE 100 Cassette Planar Plasma Wafer Etcher System

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Price:
$8,995.50 (excluding tax)
SKU:
19334
Condition:
Weight:
1,370.00 LBS
Rating:
( )
Shipping:
Calculated at checkout
Current Stock:
1
Quantity:
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Product Description

Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System
  • Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+
  • Low energy etching for minimal substrate damage.
  • Excellent selectivity, e.g., 20:1 poly Si:SiO2
  • Laser interferometer for etch rate determination and end-point detection.
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit Link to Web Page
  • Various Accessories & Wafer Holders Included
  • Complete Manuals Included
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump Available $1995

    Manufacturer

    Drytek

    Manufacturer Part Number

    DRIE-100

    Condition

    As Is

    Tech Condition

    This item has not been fully tested and is being sold as is. This item was pulled from a high end cellular equipment manufacturer and appears to be in good condition. It is sold "as is" with no warranty. Only those manual or peripherals are included. It can be previewed at our facility in Ventura, CA during business hours 8am to 5pm M-F

    Shipping

    This item requires palletized freight shipping. Domestic and International shipping rates are available using the shipping calculator link above in your cart, and include standard palletization. The Domestic shipping rate shown is for delivery to your nearest major city freight terminal to most US Mainland locations. The International shipping rate shown is for delivery to a majority of European and Asian International Airport locations. Please e-mail us for Personalized Shipping Rates if you require delivery to outlying areas (ie. islands and other isolated or remote areas.) Please include auction# or item description. Local pickup is encouraged for which all shipping and handling fees will be waived.

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