Allied Signal ElectronCure 30X-150-A-II Electron Cure 30 E-Beam Photoresist Curing Tool
Electron beam exposure system capable of exposing large area substrates uniformly at precision dose for curing coatings and hardening photoresist.
Variable Beam Voltage 0-30 KV in 100V Steps
Computer Controlled - Fully Automatic
75mm (3 Inch) to 150mm (6 Inch) Round Wafers
4 Inch x 4 Inch Square Plates
Operates at 55 millitorr Vacuum
Manufacturer
Allied Signal
Manufacturer Part Number
ElectronCure 30X-150-A-II
Condition
As Is
Tech Condition
This item has not been fully tested and is being sold as is. This curing tool was deinstalled from a working semiconductor clean room that recently closed operations. If you have any questions or specific testing you would like done please contact us. It can be previewed during business hours 8am to 5pm M-F. Please call us at (805) 648-3300 if you have any questions.
Shipping
This item requires palletized freight shipping. Domestic and International shipping rates are available using the shipping calculator link above in your cart, and include standard palletization. The Domestic shipping rate shown is for delivery to your nearest major city freight terminal to most US Mainland locations. The International shipping rate shown is for delivery to a majority of European and Asian International Airport locations. Please e-mail us for Personalized Shipping Rates if you require delivery to outlying areas (ie. islands and other isolated or remote areas.) Please include auction# or item description. Local pickup is encouraged for which all shipping and handling fees will be waived.