Description
Perkin Elmer PE2400 RF DC Sputtering Tool Computer PLC Upgrade Refurbished This sputtering tool is configured with 2 RF targets and 1 DC Target. It has 1 RF Power supply and 1 DC Power supply. The 2nd RF Target is accessed by manual switch AutomationDirect EA7-T8C PLC Computerized Controller retrofit. Perkin-Elmer Ultek Vacuum System Perkin-Elmer Servo-Match Control (p/n: 221-442-0000) Advanced Energy Industries MDX-052 (model: 3152052-000) Remote Control Interface Advanced Energy Industries MDX-5K DC Power Supply (model: 3152011-014W) Comdel CPS-1001 RF Power Source: 15-56 MHz (model: 1001/13 RF. P/n: 0920-01006) Granville-Phillips 303 Vacuum Process Controller (cat # 303007) Varian Temperature Monitor (model: 917-0085 CTI-Cryogenics Cryo-TORR 8 High Vacuum Pump HELIX (p/n: 8033167) Linde Regulator with Gauges (p/n: UPG-3-25-350) Veriflo Regulator with Gauges (p/n: 43900215 208 volts, 3 phase, 70 amp, 60 frequency
This tool was refurbished and upgraded in 2009 with PLC Computer Controls, and CTI Cyro-Torr 8 Vacuum pump. It will be throughly cleaned and tested prior to delivery. Please call us if you have any questions at (805) 648-3300
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