MKS 901P-41030 Micropirani/Piezo Loadlock Transducer

MKS 901P-41030 Micropirani/Piezo Loadlock Transducer

Designed for the loadlock environment, the Series 901P Loadlock Transducer combines Piezo and MicroPirani? sensor technologies. The combined output provides higher accuracy, stability, repeatability and an expedited response time than conventional thermal conductivity gauges.

Accurate absolute pressure measurement from 1,000 to 10-5 Torr

Gas independent absolute pressure measurement from 50 to 1,000 Torr

Accurate atmospheric pressure reading independent of gas type and barometric pressure changes

Mountable in any orientation for ease of installation with no loss of measurement accuracy

MicroPirani? solid state sensor is resistant to damage from air inrush or vibration

Specifications:

Sensor Type 1: MicroPirani? (MEMS Thermal Conductivity)

Sensor Type 2: Piezo differential (MEMS diaphragm)

Measuring Range Absolute: 1.0 x 10-5 Torr to 1500 Torr

Measuring Range Differential: -760 to +760 Torr

Set Point Range Absolute: 5.0 x 10-4 Torr to 1000 Torr

Set Point Range Differential: -760 to +100 Torr

Calibration Gas: Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon

Operating Temperature Range: 0