Astex Seocal AX3060 ECR Plasma Source Microwave Magnetron Head Isolator Tuner Magnet
Includes:

ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit

Astex SXRH Magnetron Head

CS & LS Isolator/Tuner

SmartMatch Detector Module

Astex AX3060-4 Local Interface

Astex ECR 3 uW

Astex DSM 2.5-10.5 Exit Magnet