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| Product ID:
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22473
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Product Name:
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Electron Cure 30 E-Beam Photoresist Curing Tool ~!~
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| Mfg:
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Allied Signal
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| Mfg
Part #:
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ElectronCure 30X-150-A-II
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| Qty Available:
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1
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| Price
Each:
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$39,995.00
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| Condition:
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As Is
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Allied Signal ElectronCure 30X-150-A-II Electron Cure 30 E-Beam Photoresist Curing Tool
Electron beam exposure system capable of exposing large area substrates uniformly at precision dose for curing coatings and hardening photoresist.
Variable Beam Voltage 0-30 KV in 100V Steps
Computer Controlled - Fully Automatic
75mm (3 Inch) to 150mm (6 Inch) Round Wafers
4 Inch x 4 Inch Square Plates
Operates at 55 millitorr Vacuum
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