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| Product ID:
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16179
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Product Name:
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PECVD Diamond Reactor - Large Platform
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| Mfg:
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ASTeX
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| Mfg
Part #:
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AX3060 ECR Plasma Source
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| Qty Available:
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1
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| Price
Each:
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$39,995.00
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| Condition:
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As Is
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ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform
MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility.
Includes:
ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit
Astex SXRH Magnetron Head
CS & LS Isolator/Tuner
SmartMatch Detector Module
Astex AX3060-4 Local Interface
Astex ECR 3 uW
Astex DSM 2.5-10.5 Exit Magnet
MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output
MSP Mills TS200-1.0
Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose
System, Various Other Tubing & Flow Valves
Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly
Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment
Manufacturer's Website
Large Frame/Platform & Misc Plasma Therm SLR 770 Components
Microwave & ECR Power Supply, Vacuum Pump & Computer not included.
Applications:
Base Unit for Constructing Customized Diamond CVD System
Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System
Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
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