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FSI Single Bay Vapor Phase Wafer Etcher Cleaner Washing Station (Excalibur)

FSI Excalibur Single Station Vapor Phase Wafer Etcher Cleaner
SKU: 42131
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Availability: In stock

$10,000.00
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Details

This FSI Excalibur Single Station Vapor Phase Wafer Etcher Cleaner is an older model that came from and R&D facility in California. Spare parts for these FSI Excalibur Wafer etchers are hard to find and are many times dependent upon the year the tool was made. FSI did not always use the same components to build the same model tools from year to year. FSI is no longer supporting this tool so even though the tool is nearly complete its best use would be to provide spare parts for an existing tool. Product Details
  • Designed for 150mm Wafer
  • IBM PC with software
  • Wafer Robot
  • Wafter washing bowl with load lock.
  • Wafer washing station dimensions: inner platform diameter: 2.375"
  • Wafer washing station dimensions: outer platform diameter: 6.0"
  • Wafer washing station shield dimensions: inner diameter: 6.25"
  • Metrabyte Card MSSR-32 BD PC6432 REV. 8935
  • Metrabyte Card MSSR-32 BD PC6432 REV. 8931
  • Metrabyte Card REV. 8926
  • Additional Info
    Brand FSI
    MPN Excalibur
    Model N/A
    Product Name Single Station Vapor Phase Wafer Etcher Cleaner
    Condition Used
    Condition Description This item has been inspected and appears to be in good condition
    Weight 768.0000
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