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Edwards QDP40 Dry Semiconductor DryStar Vacuum Pump 208/480 V 3-Phase 0.03 mbar

Edwards QDP40 DryStar Four-Stage Positive Displacement Rotary Vacuum Pump
SKU: 46857
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$2,800.00
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Details

Edwards QDP-40 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.

General Specifications:
  • Power rating: 208 / 480 VAC, 3-Phase, 60 Hz
  • Warm-Up Time: 15 min
  • Motor Rating: 2.2 kW
  • Inlet Connection: ISO40
  • Outlet Connection: NW40
  • Water Cooled
  • Vacuum System Maximum Leak-Rate: 1 x 10-
  • 5 mbar ls-1 (1 x 10-3 Pa ls-1)
  • Exhaust System Maximum Leak-Rate: 1 x 10-
  • 5 mbar ls-1 (1 x 10-3 Pa ls-1)
  • Ambient Operating Temperature Range: 5
  • Additional Info
    Brand Edwards
    MPN QDP40
    Model N/A
    Product Name DryStar Four-Stage Positive Displacement Rotary Vacuum Pump
    Condition Used
    Condition Description This item has been inspected and it is in good condition.
    Weight 423.0000
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    You're reviewing: Edwards QDP40 Dry Semiconductor DryStar Vacuum Pump 208/480 V 3-Phase 0.03 mbar