Edwards-Logitech Auto 306 Thermal Evaporator Coating System

Edwards-Logitech Auto 306-WCS Wax Coating System
The Logitech Wax Coating System is based on the Edwards Auto-306 Coating System with diffusion pump and resistive heat source - includes trays for four each four inch wafers & six each three inch wafers.
Installed Components:

Edwards FTM5 Thickness Monitor

Edwards E2M8 Vacuum Pump

Edwards EMF10 Oil Mist Filter

Edwards PV25EKA Solenoid Isolation Valve

Edwards E04 Diffusion Pump

Edwards E21911608 Vacuum Interlock Switch
Power Requirements:

220 VAC / 1 PH / 60 Hz / 3 KVA
Chamber Dimensions:

9.75D x 11.5H