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Edwards-Logitech Auto 306 Thermal Evaporator Coating System

Edwards-Logitech Auto 306 Thermal Evaporator Coating System
SKU: 19047
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$20,000.00
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Details

Edwards-Logitech Auto 306-WCS Wax Coating System
The Logitech Wax Coating System is based on the Edwards Auto-306 Coating System with diffusion pump and resistive heat source - includes trays for four each four inch wafers & six each three inch wafers.
Installed Components:
  • Edwards FTM5 Thickness Monitor
  • Edwards E2M8 Vacuum Pump
  • Edwards EMF10 Oil Mist Filter
  • Edwards PV25EKA Solenoid Isolation Valve
  • Edwards E04 Diffusion Pump
  • Edwards E21911608 Vacuum Interlock Switch
    Power Requirements:
  • 220 VAC / 1 PH / 60 Hz / 3 KVA
    Chamber Dimensions:
  • 9.75"D x 11.5"H
  • Additional Info
    Brand Edwards-Logitech
    MPN Auto 306
    Model No
    Product Name Thermal Evaporator Coating System
    Condition Used
    Condition Description This item has been inspected and it is in good condition.
    Weight 524.0000
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