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Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System

Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System
SKU: 19334
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Availability: In stock

$2,500.00
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Details

Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System
  • Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+
  • Low energy etching for minimal substrate damage.
  • Excellent selectivity, e.g., 20:1 poly Si:SiO2
  • Laser interferometer for etch rate determination and end-point detection.
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit
  • Various Accessories & Wafer Holders Included
  • Complete Manuals Included
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump Available $1995
  • This item was pulled from a high end cellular equipment manufacturer and appears to be in good condition. It is sold "as is" for parts or repair value.
  • Additional Info
    Brand Drytek
    MPN DRIE-100
    Model N/A
    Product Name Cassette Planar Plasma Wafer Etcher System
    Condition AS-IS
    Condition Description This item is being sold in As-Is condition and includes many useful parts. Please review description and photos and contact us with any questions.
    Weight 1370.0000
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