Description
Custom X-Y-Z-T High Precision Stage | X-Y: 0.5um Z: 2.5um T: 0.00004 Resolution
This custom stage is noted for it's precise resolution of movement, zero backlash on all axis and no deflection at the outer 8 inch edge.
Stage X-Y:
- Resolution X: 0.5 Microns Y: 0.5 Microns
- Max Speed X: 163 m/m Sec. Y: 163 m/m Sec
- Drive: Lead Screw
- Feed Back: Encoders
- Stroke X: 263 m/m Y: 417 m/m
- Dimensions: X Stage: 18 Inch x 18 Inch | Y Stage: 14 Inch x 12 Inch
Chuck - Z - T:
- Resolution Z: 2.5 Micron T Deg Step 0.00004
- Max Speed Z: 31 m/m Sec. T: 10 m/m Sec.
- Drive Z: Lead Screw
- Drive T: Banana Belt
- Load Capacity: 18.114 Kg
- Chuck 8.25 Inch Diameter 11 Inch High
- 2 Each: Compumotor Zeta4 Drives PN 87-014030-02A, & 87-014030-01A
- 2 Each: Vexta Nano Step 5-Driver Model # DFR1507A.
- 2 Each: Compumotor S83-62-MO Stepper Motors
- Drawings, Design Notes and Designer Available
- Original Cost of the X-Y Stage $17,000, Design Cost of Chuck (Z-T) $12,000, Construction Cost of Chuck $12,000, Plus Drives, Encoders, Steppers and Cabling.
This item was removed from a custom, high-end prober. The original designer is available for questions and detailed specifications can be provided. This is a high precision X-Y-Z-T Stage. This product can be previewed at our facility in Ventura, CA during normal business hours 8am to 5pm M-F.