Description
Bosch VS 18C Vertical Sputtering System
The Astex Compact ECR vaporizes the target in the small chamber. Via a gate valve the vapor cloud enters the large chamber to the electron beam coating the target object. A shutter blocks the beam once the process is complete allowing the draw down of the electron gun and pressurizing the middle chamber. A second gate valve also allows for retained vacuum at the cryopump chamber.
Chamber
Chamber: 18.5 in. Diameter - 11 in. High Motor Driven Chamber Lid Lift
HV Sputtering Cathode in lower Chamber
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Gauges & Controllers
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Note
The unit appears to be complete with the exception of an RF Power Supply to power the Electron Gun and some miscellaneous cabling. Additional photos available upon request
This item was deinstalled from a high-end research facility and appears to be in good condition. This item is used and shows signs of normal wear with minor scuffs and scrapes. No manual or peripherals are included. .
View AllClose
The Astex Compact ECR vaporizes the target in the small chamber. Via a gate valve the vapor cloud enters the large chamber to the electron beam coating the target object. A shutter blocks the beam once the process is complete allowing the draw down of the electron gun and pressurizing the middle chamber. A second gate valve also allows for retained vacuum at the cryopump chamber.
Chamber
Vacuum Pump Components
Microwave Components
Gauges & Controllers
Note