The Astex Compact ECR vaporizes the target in the small chamber. Via a gate valve the vapor cloud enters the large chamber to the electron beam coating the target object. A shutter blocks the beam once the process is complete allowing the draw down of the electron gun and pressurizing the middle chamber. A second gate valve also allows for retained vacuum at the cryopump chamber.
Vacuum Pump Components
Gauges & Controllers
|Product Name||Sputtering System - w/ CTI Cryotorr 8 Research|
|Condition Description||This item has been inspected and appears to be in good condition|