Call (805) 648-3300

ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform

Be the first to review this product

ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform
SKU: 16179
Sign up for price alert Sign up to get notified when this product is back in stock

Availability: Out of stock

$29,995.00

Same or next day processing on most orders.

Call us now for more info about our products.

Money back guarantee on purchased items. Read more...

If you don't see what you need, feel free to CONTACT US.


Description

Details


MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility.
Includes:
  • ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit
  • Astex SXRH Magnetron Head
  • CS & LS Isolator/Tuner
  • SmartMatch Detector Module
  • Astex AX3060-4 Local Interface
  • Astex ECR 3 uW
  • Astex DSM 2.5-10.5 Exit Magnet
  • MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output
  • MSP Mills TS200-1.0
  • Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves
  • Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly
  • Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment
  • Manufacturer's Website
  • Large Frame/Platform & Misc Plasma Therm SLR 770 Components
  • Microwave & ECR Power Supply, Vacuum Pump & Computer not included.
    Applications:
  • Base Unit for Constructing Customized Diamond CVD System
  • Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System
  • Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
  • Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System


    This unit is intended as a platform for building a Diamond CVD Coater system, is incomplete. No manual or peripherals are included.
  • ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform. MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility. Includes: ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit Astex SXRH Magnetron Head CS & LS Isolator/Tuner SmartMatch Detector Module Astex AX3060-4 Local Interface Astex ECR 3 uW Astex DSM 2.5-10.5 Exit Magnet MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output MSP Mills TS200-1.0 Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment Manufacturer's Website Large Frame/Platform & Misc Plasma Therm SLR 770 Components Microwave & ECR Power Supply, Vacuum Pump & Computer not included. Applications: Base Unit for Constructing Customized Diamond CVD System Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System This unit is intended as a platform for building a Diamond CVD Coater system, is incomplete. No manual or peripherals are included.

    • Price: $29,995.00 - Out of stock
    • Brand: ASTeX
    • Product ID: 16179

    Additional Info

    Additional Info

    Condition Used

    Reviews

    Write Your Own Review

    You're reviewing: ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform

    Tags

    Tags

    Use spaces to separate tags. Use single quotes (') for phrases.