ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform. MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility. Includes: ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit Astex SXRH Magnetron Head CS & LS Isolator/Tuner SmartMatch Detector Module Astex AX3060-4 Local Interface Astex ECR 3 uW Astex DSM 2.5-10.5 Exit Magnet MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output MSP Mills TS200-1.0 Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment Manufacturer's Website Large Frame/Platform & Misc Plasma Therm SLR 770 Components Microwave & ECR Power Supply, Vacuum Pump & Computer not included. Applications: Base Unit for Constructing Customized Diamond CVD System Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System This unit is intended as a platform for building a Diamond CVD Coater system, is incomplete. No manual or peripherals are included.
- Price: $29,995.00 - Out of stock
- Brand: ASTeX
- Product ID: 16179