Call (805) 648-3300

ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform

ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform
SKU: 16179
Sign up for price alert Sign up to get notified when this product is back in stock

Availability: Out of stock

$29,995.00
Add Items to Cart

Same or next day processing on most orders.

Call us now for more info about our products.

Money back guarantee on purchased items. Read more...

If you don't see what you need, feel free to CONTACT US.


Details


MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility.
Includes:
  • ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit
  • Astex SXRH Magnetron Head
  • CS & LS Isolator/Tuner
  • SmartMatch Detector Module
  • Astex AX3060-4 Local Interface
  • Astex ECR 3 uW
  • Astex DSM 2.5-10.5 Exit Magnet
  • MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output
  • MSP Mills TS200-1.0
  • Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves
  • Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly
  • Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment
  • Manufacturer's Website
  • Large Frame/Platform & Misc Plasma Therm SLR 770 Components
  • Microwave & ECR Power Supply, Vacuum Pump & Computer not included.
    Applications:
  • Base Unit for Constructing Customized Diamond CVD System
  • Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System
  • Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System
  • Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System


    This unit is intended as a platform for building a Diamond CVD Coater system, is incomplete. No manual or peripherals are included.
  • Additional Info

    Brand ASTeX
    MPN AX3060 ECR Plasma Source
    Model N/A
    Product Name PECVD Diamond Reactor - Large Platform
    Condition Used
    Condition Description This item has been inspected and appears to be in good condition
    Weight 1650.0000

    Get notified !

    Subscribe to receive an email as soon as this product become available again!